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10^-5 Pa Contact switch for high vacuum class.
[Features]
· Positioning switch dedicated for high vacuum environment, manufactured only with low out gas compatible parts.
[Applications]
· For detecting the presence of a semiconductor wafer in a vacuum chamber.
· For positioning glass substrates in vacuum deposition systems and photovoltaic (PV) vacuum systems.
· For alignment of glass substrates in a vacuum deposition system for FPD, detection of mask tray seating, and retrieval of carrier origin.
· The product has been adopted by major semiconductor manufacturing equipment manufacturers, one after another.
Part Number |
---|
GN-PT5M3A |
GN-PT5M3A-R |
GN-PT5M3B |
GN-PT5M3B-R |
Part Number | Price | Name | Minimum Order Qty. | Volume Discount | Days to Ship | RoHS | Contact Point Type | Operating Point (mm) | Cord direction |
---|---|---|---|---|---|---|---|---|---|
฿ 8,033.02 | METROL | 1 Piece(s) | 3 Day(s) | 10 | Contact type NO | 0.3 | Straight | ||
฿ 8,675.51 | METROL | 1 Piece(s) | 11 Day(s) | 10 | Contact type NO | 0.3 | Perpendicularity | ||
฿ 8,541.38 | METROL | 1 Piece(s) | 21 Day(s) | 10 | Contact type NC | 0 | Straight | ||
฿ 8,675.51 | METROL | 1 Piece(s) | 11 Day(s) | 10 | Contact type NC | 0 | Perpendicularity |
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Type | Pin stroke shape/Spring Plungers Type | Main Body Shape | Bolt Type | Tip shape | R Contact |
---|---|---|---|---|---|
Environment | Vacuum | Body Material | SUS304 | Contact Material | SUS HRC45 |
Stroke(mm) | 1.5 | Nominal of Thread (M) | M5×0.5 | Repeatability | 0.003mm |
Contact Force(N) | 0.5 | Contact point accuracy life(x 10K times) | 300 | Tip diameter | Ø1.5 |
Protection Structure | IP40 | LED | No | Compatible vacuum strength | 10^-5Pa |
Allowable backing temperature | 120℃ |
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