Compact Flow Sensor, RAPIFLOW, FSM Series

[Features]
・ Platinum sensor chip applying silicone micromachining
・ Unprecedented compactness and high-speed response have been achieved with the newly proposed rectification mechanism
・ Rapiflow, a thermal flow sensor that can be attached to the tip of a movable part near the measuring part, can be used for adsorption confirmation and leak inspection of electronic parts as a system (R)