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Hyper MF/MF-U SERIES 176 — High-Accuracy Measuring Microscopes (176-430)

HYPER MF/MF-U SERIES 176

Hyper MF/MF-U SERIES 176 — High-Accuracy Measuring Microscopes (176-430)
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Product Description

• Ultimate automated world's highest accuracy Measuring Microscope (Minimum display Resolution0.01um).
• The front-operation design of the main unit is based on the concept of UD (universal design).
• Three-axis motorized front operation joystick control, which makes a refreshing change from conventional microscope operation, allows fine positioning even during fast movement.
• User selection of a conventional microscope optical tube or one equipped with built-in laser AF has improved measurement throughput due to the diversified observation methods available.
• Large workstage with stroke of 250×150mm provides enough margin for the measurement of larger workpieces.
• Utilizes ultra-high-precision glass scales with low thermal expansion and a detector head with high resolution.
• The best-selling data processing unit, QM-Data200, and the Vision Unit can be integrated to provide an effective and stable measurement environment.
• A wafer holder (available for wafers of less than 8”) and high rigidity center supports meet the needs for high precision measurement.
• Motorized turret models are equipped with a retracting function that works when the objective lens is changed.

Part Number
176-430
Part NumberPriceNameMinimum Order Qty.Volume DiscountDays to ShipDetailed Type Optical tube Optical tube (Vertical tilt angle) Objective lens (optional) Objective lens (optional): ML series objective lens Objective lens (optional): BF (Bright field) Objective lens (optional): BD (Bright / Dark field) Turret (optional): BF (Bright field) Turret (optional): BD (Bright / Dark field) Operation section: LAF (just focus) Operation section: LAF (tracking focus) Turret remote control

฿ 999,999,999.00

HYPER MF/MF-U SERIES 176 1 Piece(s) 95 Day(s) HyperMF-B2515BFinite correction optical system25°Selectable from the monocular unit (equipped with an eyepiece) or binocular tube (equipped with two eyepieces)1X / 3X / 5X / 10X / 20X / 50X / 100X

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Basic Information

Product Type Microscope Supplies Observation image Erect image LED illumination unit Telecentric system / Built-in aperture diaphragm / Halogen bulb (12V, 50W) / 100-step light intensity control / Fiber optics cable cold light illumination, Reflecked illumination: Koehler illumination / Variable aperture diaphragm mechanism / Halogen bulb (12V, 100W) / 100-step light intensity control / Fiber optics cable cold light illumination
Optical tube: Standard reticle (Built-in) 90° broken-cross line (line width 5μm) Optical tube (Pupil distance adjustment) Siedentopf type Adjustment range: 51 to 76mm Optical tube (Optical path switching ratio) Observation/TVphotomicrography = 50/50
Optical tube (TV port) Provided as standard Eyepiece Magnification 10X / 15X / 20X Focusing section: Maximum height of workpiece 150mm
Focusing section: Measuring accuracy (1.5+0.01L) μm / L: Measuring length (mm) Focusing section: Drive method Motorized control with the use of a joystick Workstage: Measuring range (X×Y) 250×150mm
Workstage: Measuring accuracy (When no load is put on the X- or Y-axis) (0.9+0.003L) μm / L: Measuring length (mm) Workstage (Dimensions of the top plane) 460×350mm Workstage (Usable dimensions of the stage glass) 300×200mm
Workstage (Swiveling angle) ±3° Workstage (Maximum loading mass) 30kg Workstage (Drive method) Motorized control with the use of a joystick
Detector High precision digital scale (Patented) Digital display (Resolution) 0.01μm Digital display (Axes to be displayed) X / Y / Z
Digital display (Data processing unit) QM-Data200 or Vision Unit Operation section (Joystick lock) Available Operation section (Fine pitch) Available
Operation section (Digital display reset) Available Operation section (Illumination light intensity control) Available Measurement result file output Operation section (data output) Available