Hyper MF/MF-U SERIES 176 — High-Accuracy Measuring Microscopes

• Ultimate automated world's highest accuracy Measuring Microscope (Minimum display Resolution0.01um).
• The front-operation design of the main unit is based on the concept of UD (universal design).
• Three-axis motorized front operation joystick control, which makes a refreshing change from conventional microscope operation, allows fine positioning even during fast movement.
• User selection of a conventional microscope optical tube or one equipped with built-in laser AF has improved measurement throughput due to the diversified observation methods available.
• Large workstage with stroke of 250×150mm provides enough margin for the measurement of larger workpieces.
• Utilizes ultra-high-precision glass scales with low thermal expansion and a detector head with high resolution.
• The best-selling data processing unit, QM-Data200, and the Vision Unit can be integrated to provide an effective and stable measurement environment.
• A wafer holder (available for wafers of less than 8”) and high rigidity center supports meet the needs for high precision measurement.
• Motorized turret models are equipped with a retracting function that works when the objective lens is changed.