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• Ultimate automated world's highest accuracy Measuring Microscope (Minimum display Resolution0.01um).
• The front-operation design of the main unit is based on the concept of UD (universal design).
• Three-axis motorized front operation joystick control, which makes a refreshing change from conventional microscope operation, allows fine positioning even during fast movement.
• User selection of a conventional microscope optical tube or one equipped with built-in laser AF has improved measurement throughput due to the diversified observation methods available.
• Large workstage with stroke of 250×150mm provides enough margin for the measurement of larger workpieces.
• Utilizes ultra-high-precision glass scales with low thermal expansion and a detector head with high resolution.
• The best-selling data processing unit, QM-Data200, and the Vision Unit can be integrated to provide an effective and stable measurement environment.
• A wafer holder (available for wafers of less than 8”) and high rigidity center supports meet the needs for high precision measurement.
• Motorized turret models are equipped with a retracting function that works when the objective lens is changed.
Part Number |
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176-432 |
Part Number | Price | Name | Minimum Order Qty. | Volume Discount | Days to Ship | Detailed Type | Optical tube | Optical tube (Vertical tilt angle) | Objective lens (optional) | Objective lens (optional): ML series objective lens | Objective lens (optional): BF (Bright field) | Objective lens (optional): BD (Bright / Dark field) | Turret (optional): BF (Bright field) | Turret (optional): BD (Bright / Dark field) | Operation section: LAF (just focus) | Operation section: LAF (tracking focus) | Turret remote control |
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฿ 999,999,999.00 | HYPER MF/MF-U SERIES 176 | 1 Piece(s) | 95 Day(s) | HyperMF-UD2515B | Infinity-correction optical system BD (Bright / Dark field) | Tilting | Equipped with two 10X eyepieces | — | M Plan Apo / M plan Apo SL / G plan Apo | BD Plan Apo / BD Plan Apo SL | (Equipped with a four-hole manual sensor / motorized five-hole sensor) | (Equipped with a four-hole manual sensor / motorized four-hole sensor) | — | — | Available (when installing a motorized turret) |
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Product Type | Microscope Supplies | Observation image | Erect image | LED illumination unit | Telecentric system / Built-in aperture diaphragm / Halogen bulb (12V, 50W) / 100-step light intensity control / Fiber optics cable cold light illumination, Reflecked illumination: Koehler illumination / Variable aperture diaphragm mechanism / Halogen bulb (12V, 100W) / 100-step light intensity control / Fiber optics cable cold light illumination |
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Optical tube: Standard reticle (Built-in) | 90° broken-cross line (line width 5μm) | Optical tube (Pupil distance adjustment) | Siedentopf type Adjustment range: 51 to 76mm | Optical tube (Optical path switching ratio) | Observation/TVphotomicrography = 50/50 |
Optical tube (TV port) | Provided as standard | Eyepiece Magnification | 10X / 15X / 20X | Focusing section: Maximum height of workpiece | 150mm |
Focusing section: Measuring accuracy | (1.5+0.01L) μm / L: Measuring length (mm) | Focusing section: Drive method | Motorized control with the use of a joystick | Workstage: Measuring range (X×Y) | 250×150mm |
Workstage: Measuring accuracy (When no load is put on the X- or Y-axis) | (0.9+0.003L) μm / L: Measuring length (mm) | Workstage (Dimensions of the top plane) | 460×350mm | Workstage (Usable dimensions of the stage glass) | 300×200mm |
Workstage (Swiveling angle) | ±3° | Workstage (Maximum loading mass) | 30kg | Workstage (Drive method) | Motorized control with the use of a joystick |
Detector | High precision digital scale (Patented) | Digital display (Resolution) | 0.01μm | Digital display (Axes to be displayed) | X / Y / Z |
Digital display (Data processing unit) | QM-Data200 or Vision Unit | Operation section (Joystick lock) | Available | Operation section (Fine pitch) | Available |
Operation section (Digital display reset) | Available | Operation section (Illumination light intensity control) | Available | Measurement result file output | Operation section (data output) Available |
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