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• Applies the image correlation of a speckle pattern.
• Simultaneous, non-contact measurement of X-Y position.
• Nano-resolution measurement.
• Suitable for applications such as stage position repeatability.
• Capable of measuring slight deformations and flex of parts.
Product Model | Measurement element | Product model | MICSYS-SA1 | Resolution | 1nm |
---|---|---|---|---|---|
Accuracy (20°C) | ±100nm | Effective range | ±100μm (2D) | Detection method | Laser speckle image correlation |
Data update frequency | 20Hz |
How can we improve?
How can we improve?