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2D Image Correlation Encoder SERIES 549 (Part Number)
2D IMAGE CORRELATION ENCODER
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Product DetailProduct Description
• Applies the image correlation of a speckle pattern.
• Simultaneous, non-contact measurement of X-Y position.
• Nano-resolution measurement.
• Suitable for applications such as stage position repeatability.
• Capable of measuring slight deformations and flex of parts.
Basic Information
| Product Model | Measurement element | Product model | MICSYS-SA1 | Resolution | 1nm |
|---|---|---|---|---|---|
| Accuracy (20°C) | ±100nm | Effective range | ±100μm (2D) | Detection method | Laser speckle image correlation |
| Data update frequency | 20Hz |
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