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Vacuum Pumps（Power Supply：AC）
You can search for the desired vacuum pumps on this site by product specification, model number, manufacturer name, etc. The pump required depends on the vacuum state (degree of vacuum). Select a pump suitable for the particular application.
[Vacuum Pump Details]
Vacuum pumps consist of three parts: the intake port, the exhaust port and the pump.
Intake port: The intake port connects to the vacuum chamber with a vacuum flange. The exhaust speed is the measured amount of gas that passes through the inlet per unit time, as defined by JIIS.
Exhaust port: The gas from within the vacuum pump is discharged from the chamber through the exhaust port.
Pump: This is the main actor in gas discharging operation. Proper use according the exhaust method and exhaust performance needs to be considered as there are many kinds of pumps.
Configure
Specification/Dimensions
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Vacuum Pump Type
- Dry Type
- Oil Rotation Type
- Vacuum Pump Related Components
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Dry Type Category
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Ultimate Vacuum Pressure(Pa)
- ~1
- 1~2
- 2~3
- 3~4
- 4~5
- 6~7
- 7~
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Power Supply
- AC
- DC
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Voltage (V)
- 12
- 24
- 100
- 120
- 200
- 230
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Operating Environment
- Standard
- Corrosion Resistance Required
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Additional Function
Brand |
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- 47 items
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You can add up to 6 items per a category to the compare list.
Vacuum Pump, Dry Pump KRF Series
ORIONKIKAI
Provides a reassuring design, low operating noise and long work life. It is a next generation pump that is environmentally friendly.From: ฿ 39,255.88 Days to Ship: 
40 Day(s)
40 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 33,924.28 Days to Ship:
12 Day(s)
12 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 5,824.36 Days to Ship:
Same day
Same day
-
You can add up to 6 items per a category to the compare list.
From: ฿ 71,471.05 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 16,408.33 Days to Ship:
10 Day(s)
10 Day(s)
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You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DA-60S, Diaphragm Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 39,270.00 Days to Ship:
12 Day(s)
12 Day(s)
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You can add up to 6 items per a category to the compare list.
Vacuum Pump G-50DA, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 49,758.34 Days to Ship:
10 Day(s)
10 Day(s)
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You can add up to 6 items per a category to the compare list.
Vacuum Pump, Linicon (Vacuum Pump) LV-125A/LV-140A
NITTOKOHKI
[Features]
· Accessory: Microcoupler (MC04PH) 1 pieceFrom: ฿ 13,846.50 Days to Ship:
23 Day(s)
23 Day(s)
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You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump, Swing Piston Type
ULVACKIKO
[Features]· This is a vacuum pump that exhausts by a cup gasket (special plastic) reciprocating in a cylinder.· It is a dry type vacuum pump that does not use oil or water in the gas contact section.· Dedicated pressure types are also available.[Applications]· Vacuum chuck, vacuum tweezers.· Food packaging equipment, vacuum forming equipment.· Suction transport.· Vacuum suction transport for automatic equipment, etc.· Vacuum wrapping, printing equipment.· Suction pump equipment.· Chip mounters.From: ฿ 41,755.28 Days to Ship:
12 Day(s)
12 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 69,037.43 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DA-241S, Diaphragm Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 100.00 Days to Ship:
40 Day(s)
40 Day(s)
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You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DAP-12S, Diaphragm Type
ULVACKIKO
A dry pump that does not use oil.
[Features]
· This is a high vacuum diaphragm type vacuum pump that also provides a function to achieve ultimate pressure performance with a diaphragm type vacuum pump.
· DAU / The MD series uses a 3-stage multiple pump head to provide a vacuum region that cannot be obtained with ordinary diaphragm type pumps.
· It has wide usage and verified quality and reliability.
· Can be used as a backing pump for a wide range type turbo molecular pump.
· There is also a corrosion resistant type in the MD series.From: ฿ 10,095.37 Days to Ship:
10 Day(s)
10 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 93,163.34 Days to Ship:
12 Day(s)
12 Day(s)
-
You can add up to 6 items per a category to the compare list.
Vacuum Pump G-10DA, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.
[Features]
· This direct connect type hydraulic rotation vacuum pump is a Gaede type rotating wing type vacuum pump.
· Features include the Gaede type, which lubricates rotating parts and seals the vacuum using the vacuum pump oil, so it is a pump with high reliability and stable high vacuum.
· In addition, it is a direct connect type, so it offers high speed rotation and higher exhaust speed with smaller size in comparison to belt methods.
· The G series has had much usage over many years, remaining a standard oil rotation sink pump with low cost.
· The G series comes in a SingleStage and a Two-satage.From: ฿ 44,993.34 Days to Ship:
40 Day(s)
40 Day(s)
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You can add up to 6 items per a category to the compare list.
Vacuum Pump G-50SA, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 46,581.67 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
Vacuum Pump GLD-051, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
It is an oil rotation type vacuum pump with reverse flow check function.From: ฿ 79,401.67 Days to Ship:
10 Day(s)
10 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 21,873.59 Days to Ship:
Same day
Same day
-
You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DA-121D, Diaphragm Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 96,315.29 Days to Ship:
40 Day(s)
40 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 35,246.31 Days to Ship:
12 Day(s)
12 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 47,874.21 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
Vacuum Pump G-5DA, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.
[Features]
· This direct connect type hydraulic rotation vacuum pump is a Gaede type rotating wing type vacuum pump.
· Features include the Gaede type, which lubricates rotating parts and seals the vacuum using the vacuum pump oil, so it is a pump with high reliability and stable high vacuum.
· In addition, it is a direct connect type, so it offers high speed rotation and higher exhaust speed with smaller size in comparison to belt methods.
· The G series has had much usage over many years, remaining a standard oil rotation sink pump with low cost.
· The G series comes in a SingleStage and a Two-satage.From: ฿ 39,700.00 Days to Ship:
12 Day(s)
12 Day(s)
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You can add up to 6 items per a category to the compare list.
Vacuum Pump/Compressor Combination Type VC0101-A1
NITTOKOHKI
This is a vacuum pump part that can be used in a clean environment that does not use oil. The vacuum pump / compressor dual use type VC0101-A1 is from the famous Japanese maker Nitto Kohki.
· Type: Dry type dry type: diaphragmFrom: ฿ 6,762.59 Days to Ship:
21 Day(s)
21 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 46,604.39 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 31,760.00 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DAP-6D, Diaphragm Type
ULVACKIKO
A dry pump that does not use oil.
[Features]
· This is a high vacuum diaphragm type vacuum pump that also provides a function to achieve ultimate pressure performance with a diaphragm type vacuum pump.
· DAU / The MD series uses a 3-stage multiple pump head to provide a vacuum region that cannot be obtained with ordinary diaphragm type pumps.
· It has wide usage and verified quality and reliability.
· Can be used as a backing pump for a wide range type turbo molecular pump.
· There is also a corrosion resistant type in the MD series.From: ฿ 9,702.31 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 111,161.67 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
Vacuum Pump G-25SA, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 37,055.00 Days to Ship:
10 Day(s)
10 Day(s)
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You can add up to 6 items per a category to the compare list.
Vacuum Pump, Free Piston, VP Series
NITTOKOHKI
[Features]
· A wide series that also support vacuum uses.From: ฿ 22,261.56 Days to Ship:
16 Day(s)
16 Day(s)
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You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump, Diaphragm Type
ULVACKIKO
[Features]· This is a vacuum pump that exhausts by using the reciprocating motion of a rubber membrane (diaphragm).· It is a dry vacuum pump that does not use oil, water etc. at the gas contact section. A thermal protector is built-in, and safety factors have been considered.· It has a simple structure, and maintenance is easy.[Applications]· Suction transport, suction fastening, vacuum tweezers.· Analysis equipment, scientific equipment.· Semiconductor inspection devices.· Device assembly.· Automatic machines, wrapping machines.From: ฿ 50,367.61 Days to Ship:
19 Day(s)
19 Day(s)
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You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DA-15D, Diaphragm Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 26,898.57 Days to Ship:
12 Day(s)
12 Day(s)
-
You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DA-30D, Diaphragm Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 36,417.65 Days to Ship:
10 Day(s)
10 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 27,769.35 Days to Ship:
12 Day(s)
12 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 140,046.11 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 189,058.00 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 93,433.00 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 52,708.52 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
From: ฿ 100.00 Days to Ship:
Quote
Quote
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You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DAU-20, Diaphragm Type
ULVACKIKO
[Features]
· This is a dry type vacuum pump with diaphragm.From: ฿ 70,471.68 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump (Chemical Type), Diaphragm Type
ULVACKIKO
[Features]· This is a chemical type diaphragm vacuum pump that uses corrosion resistant parts of PTFE, etc., in the gas contact section.[Applications]·Rotary evaporators.· Vacuum concentration, vacuum filtering, centrifugal separation.· Vacuum drying.· Medical equipment, drug making equipment.· Special gas exchange.· Analysis equipment, scientific equipment.From: ฿ 130,671.67 Days to Ship:
12 Day(s)
12 Day(s)
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You can add up to 6 items per a category to the compare list.
Dry Vacuum Pump DTU-20, Diaphragm Type
ULVACKIKO
This is a diaphragm type dry vacuum pump.
[Features]
· This is a high vacuum diaphragm type vacuum pump that also provides a function to achieve ultimate pressure performance with a diaphragm type vacuum pump.
· DAU/ The MD series uses a 3-stage multiple pump head to provide a vacuum region that cannot be obtained with ordinary diaphragm type pumps.
· It has wide usage and verified quality and reliability.
· Can be used as a backing pump for a wide range type turbo molecular pump.
· The "DAU-100H" is ideal for difficult operational intervals that repeat the pump action.
· There is also a corrosion resistant type in the MD series.From: ฿ 97,209.87 Days to Ship:
40 Day(s)
40 Day(s)
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You can add up to 6 items per a category to the compare list.
From: ฿ 43,055.84 Days to Ship:
10 Day(s)
10 Day(s)
-
You can add up to 6 items per a category to the compare list.
Vacuum Pump G-20DA, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
This is a direct connect type hydraulic rotation vacuum pump.From: ฿ 46,051.67 Days to Ship:
12 Day(s)
12 Day(s)
-
You can add up to 6 items per a category to the compare list.
Vacuum Pump GCD-051X, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
It is an oil rotation type vacuum pump with reverse flow check function.
[Features]
· The "GCD Series" is a high corrosion resistance pump that has undergone the special surface treatment (Clean S) of the "GLD Series."
· This pump is ideal for vacuum suction in handling special liquids or special gases used in the chemical industry, semiconductor industry, and medical devices industry, etc.
· There are 3 models, which are between 50 to 200L/min.
· By using a flange motor, noise, vibration and full load current are all greatly reduced (maker comparisons).
· Use this for environmental measures and energy savings.From: ฿ 95,366.94 Days to Ship:
40 Day(s)
40 Day(s)
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You can add up to 6 items per a category to the compare list.
Vacuum Pump GCD-136X, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
It is an oil rotation type vacuum pump with reverse flow check function.
[Features]
· The "GCD Series" is a high corrosion resistance pump that has undergone the special surface treatment (Clean S) of the "GLD Series."
· This pump is ideal for vacuum suction in handling special liquids or special gases used in the chemical industry, semiconductor industry, and medical devices industry, etc.
· There are 3 models, which are between 50 to 200L/min.
· By using a flange motor, noise, vibration and full load current are all greatly reduced (maker comparisons).
· Use this for environmental measures and energy savings.From: ฿ 130,598.06 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
Vacuum Pump GCD-201X, Hydraulic Rotation, Direct Connect Type
ULVACKIKO
It is an oil rotation type vacuum pump with reverse flow check function.From: ฿ 162,892.37 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
Hydraulic Rotation Vacuum Pump, Direct Connect (Standard Type)
ULVACKIKO
[Features]· A Gaede type vacuum pump, it lubricates and vacuum seals the rotating parts with the vacuum pump oil, providing a high vacuum that is stable.· It is a motor direct connect type, so the higher rotation speed provides high exhaust speed in a small size in comparison to belt drive methods.[Applications]· Equipment for scientific experiments, analysis instruments, and laser devices.· Backing for vacuum exhaust devices and electronic microscopes.· Semiconductor manufacturing devices.· Vacuum deposition equipment and freeze-drying equipment.· General medical equipment.From: ฿ 66,168.34 Days to Ship:
40 Day(s)
40 Day(s)
-
You can add up to 6 items per a category to the compare list.
Hydraulic Rotation Vacuum Pump, Direct Connect Type (Magnetic Coupling Type)
ULVACKIKO
[Features]· By adopting a magnetic coupling structure, this pump does not leak from shaft seals and offers long work life.[Applications]· Equipment for scientific experiments, analysis instruments, and laser devices.· Backing for vacuum exhaust devices and electronic microscopes.· Semiconductor manufacturing equipment, sputter machines, vacuum deposition devices.· Vacuum drying equipment, freeze-drying equipment.· Leak detector.From: ฿ 60,590.60 Days to Ship:
40 Day(s)
40 Day(s)
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| Product Series |
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| Days to Ship |
| Vacuum Pump Type |
| Dry Type Category |
| Ultimate Vacuum Pressure(Pa) |
| Power Supply |
| Voltage (V) |
| Operating Environment |
| Additional Function |
You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.    | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.    | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | |
| Brand | ORIONKIKAI | ULVACKIKO | MISUMI | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | NITTOKOHKI | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | MISUMI | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | NITTOKOHKI | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | NITTOKOHKI | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO | ULVACKIKO |
| Product Series | Vacuum Pump GLD-051, Hydraulic Rotation, Direct Connect Type | Vacuum Pump GCD-051X, Hydraulic Rotation, Direct Connect Type | Vacuum Pump GCD-136X, Hydraulic Rotation, Direct Connect Type | Vacuum Pump GCD-201X, Hydraulic Rotation, Direct Connect Type | Hydraulic Rotation Vacuum Pump, Direct Connect (Standard Type) | Hydraulic Rotation Vacuum Pump, Direct Connect Type (Magnetic Coupling Type) | |||||||||||||||||||||||||||||||||||||||||
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| From | ฿ 39,255.88 | ฿ 33,924.28 | ฿ 5,824.36 | ฿ 71,471.05 | ฿ 16,408.33 | ฿ 39,270.00 | ฿ 49,758.34 | ฿ 13,846.50 | ฿ 41,755.28 | ฿ 69,037.43 | ฿ 100.00 | ฿ 10,095.37 | ฿ 93,163.34 | ฿ 44,993.34 | ฿ 46,581.67 | ฿ 79,401.67 | ฿ 21,873.59 | ฿ 96,315.29 | ฿ 35,246.31 | ฿ 47,874.21 | ฿ 39,700.00 | ฿ 6,762.59 | ฿ 46,604.39 | ฿ 31,760.00 | ฿ 9,702.31 | ฿ 111,161.67 | ฿ 37,055.00 | ฿ 22,261.56 | ฿ 50,367.61 | ฿ 26,898.57 | ฿ 36,417.65 | ฿ 27,769.35 | ฿ 140,046.11 | ฿ 189,058.00 | ฿ 93,433.00 | ฿ 52,708.52 | ฿ 100.00 | ฿ 70,471.68 | ฿ 130,671.67 | ฿ 97,209.87 | ฿ 43,055.84 | ฿ 46,051.67 | ฿ 95,366.94 | ฿ 130,598.06 | ฿ 162,892.37 | ฿ 66,168.34 | ฿ 60,590.60 |
| Days to Ship | 40 Day(s) | 12 Day(s) | Same day | 10 Day(s) | 10 Day(s) | 12 Day(s) | 10 Day(s) | 23 Day(s) | 12 Day(s) | 40 Day(s) | 40 Day(s) | 10 Day(s) | 12 Day(s) | 40 Day(s) | 10 Day(s) | 10 Day(s) | Same day | 40 Day(s) | 12 Day(s) | 10 Day(s) | 12 Day(s) | 21 Day(s) | 10 Day(s) | 10 Day(s) | 10 Day(s) | 10 Day(s) | 10 Day(s) | 16 Day(s) | 19 Day(s) | 12 Day(s) | 10 Day(s) | 12 Day(s) | 40 Day(s) | 40 Day(s) | 40 Day(s) | 40 Day(s) | Quote | 10 Day(s) | 12 Day(s) | 40 Day(s) | 10 Day(s) | 12 Day(s) | 40 Day(s) | 40 Day(s) | 40 Day(s) | 40 Day(s) | 40 Day(s) |
| Vacuum Pump Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Oil Rotation Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Oil Rotation Type | Oil Rotation Type | Oil Rotation Type | Dry Type | Dry Type | Dry Type | Dry Type | Oil Rotation Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Oil Rotation Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Dry Type | Oil Rotation Type | Oil Rotation Type | Oil Rotation Type | Oil Rotation Type | Oil Rotation Type | Oil Rotation Type |
| Dry Type Category | Vane Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | - | Diaphragm Type | Piston Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | - | - | - | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | - | Piston Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | - | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Diaphragm Type | Piston Type | - | - | - | - | - | - |
| Ultimate Vacuum Pressure(Pa) | 7~ | ~1 | - | ~1 | 3~4 | 2~3 | ~1 | - | ~1 | 1~2 | 1~2 | 2~3 | ~1 | ~1 | ~1 | ~1 | - | ~1 | 1~2 | 1~2 | ~1 | 7~ | ~1 | ~1 | ~1 | ~1 | ~1 | 1~2 / 6~7 | 1~2 | ~1 | ~1 | 2~3 | ~1 | 1~2 | 1~2 | ~1 | ~1 | ~1 | ~1 | ~1 | ~1 | ~1 | ~1 | ~1 | ~1 | ~1 | ~1 |
| Power Supply | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC | AC |
| Voltage (V) | 100 / 200 | 100 / 200 | 100 | 100 | 100 | 100 | 100 | 100 | 100 / 200 / 230 | 100 | 100 / 200 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 200 | 200 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 120 | 100 | 100 / 120 |
| Operating Environment | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Corrosion Resistance Required | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Corrosion Resistance Required | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard / Corrosion Resistance Required | Corrosion Resistance Required | Standard | Standard | Corrosion Resistance Required | Corrosion Resistance Required | Corrosion Resistance Required | Standard | Standard |
| Additional Function | Not Provided | Not Provided | Not Provided | Not Provided / Unloading Mechanism | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided / Unloading Mechanism | Not Provided | Not Provided | Not Provided | Not Provided | Reverse Flow Prevention Function | Reverse Flow Prevention Function / Forced Oil Supply Mechanism / Gas Ballast Mechanism | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided / Unloading Mechanism | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Reverse Flow Prevention Function / Forced Oil Supply Mechanism / Gas Ballast Mechanism | Reverse Flow Prevention Function / Forced Oil Supply Mechanism / Gas Ballast Mechanism | Reverse Flow Prevention Function / Forced Oil Supply Mechanism / Gas Ballast Mechanism | Not Provided | Not Provided |
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