VMU series SERIES 378 — Video Microscope Unit

• Compact and lightweight microscope unit dedicated observation by camera. Suitable for inspecting metal surfaces, semiconductors, liquid crystal substrates, resin, etc.
• A versatile microscope head typically used as an OEM product suitable for fitting to specialist machines, such as those designed for inspection and repair of semiconductor wafers using YAG (near-infrared, visible, nearultraviolet, or ultraviolet) laser*.
* The performance and safety of the laser-equipped system products is not guaranteed.
Applications: cutting, trimming, correcting, marking of semiconductor circuits / clearing & processing of thin films (insulation films), repairing (correcting failure) of liquid crystal color filters. Also suited for use as the optical observation section for a prober analyzing semiconductor failures.
• For VMU-LB and VMU-LB, the rigidity and general performance of the microscope main unit have been enhanced compared with previous models.
• Applications*: internal observation of silicon systems, spectral characteristics analysis using infrared, etc.
* An infrared source and infrared camera are necessary.
• Telecentric system equipped with an aperture diaphragm is standard on the surface
illumination optical system. Best suited to process images for which the uniform illumination is required. Available for the dimensional measurement, form inspection, positioning, etc.
• Design and manufacture are available to meet your demands such as double camera mounting, double (low/high) magnification.