FS-70 series SERIES 378 — Microscope Unit for Semiconductor Inspection

• Compact microscope unit equipped with an eyepiece observation section. Suitable for inspecting metal surfaces, semiconductors, liquid crystal substrates, resin, etc.
• A versatile microscope head typically used as an OEM product suitable for fitting to specialist machines, such as those designed for inspection and repair of semiconductor wafers using YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) lasers*.
* The performance and safety of the laser-equipped system products is not guaranteed.
Applications: cutting, trimming, correcting, marking of semiconductor circuits / clearing & processing of thin films (insulation films), repairing (correcting failure) of liquid crystal color filters. Also suited for use as the optical observation section for a prober analyzing semiconductor failures.
• Usable in infrared optical systems*. Applications: internal observation of silicon systems; spectral characteristics analysis using infrared.
* An infrared source and infrared camera are necessary.
• Models supporting BF (Bright field), DF (Dark field), Polarization, and Differential Interference Contrast (DIC) are available.
• Koehler illumination equipped with an aperture diaphragm is provided as standard on the surface illumination optical system.
• The inwardly slanting turret and ultra-long working distance objective lens maintains the high operability under the microscope. Koehler illumination is equipped with the aperture diaphragm as standard on the surface illumination optical system.