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• High-accuracy stylus type CNC Surface Roughness / Contour Measuring System that allows measurement of surface roughness and form/contour with one unit through detector replacement.
• The X1-, Y- and Z2-axes have a maximum drive speed of 200mm/s. This permits high-speed positioning that can potentially result in a large increase in the throughput of multiple-profile / multipleworkpiece
measurement tasks.
• For models with the α axis, it is possible to perform continuous measurement over horizontal and inclined surfaces by powertilting the X1 axis. In addition, automatic measuring force adjustment function of Z1-axis detector for contour measurement enables automatic measurement with
constant measuring force even with the X1 axis tilted.
• For models with the Y-axis table, it is possible to expand the measuring range for multiple workpieces, etc., through positioning in the Y-axis direction.
• Detector for contour measuring systems (Z1 axis) Accuracy ±(0.8+|2H|/100)µm
• For the model without an α axis, indication accuracy of the Z2-axis (column) is guaranteed. For this reason, it expands the measuring range of the Z1 axis (detector) in form/contour measurement by using the Z2-axis tracing function.
• 2-axis simultaneous control in the X- and Y-axis directions enables inclined plane
measurements.
• When the Z1-axis detector for form/contour measurement is replaced with that for surface roughness measurement, or vice versa, it is a simple, one-touch replacement without rerouting of the connecting cables.
• Since the Z1-axis detector incorporates an anti-collision safety device, the machine will automatically stop if the detector touches a workpiece or jig.
• Optional external control function (Ext I/O) through bidirectional communication (RS-232C) with the PLC (programmable logic controller) is available.
Product Model | Measurement element | X1 Axis Measuring Range | 200mm | X1 Axis Resolution | 0.05 µm |
---|---|---|---|---|---|
X1 Axis Scale type | Reflective-type linear encoder | Z2 Axis (Column) Resolution | 0.05 µm | Z2 Axis (Column) Scale type | Reflective-type linear encoder |
Z2 Axis (Column) Base material | Gabbro | X1 Axis (Drive unit) Drive speed - CNC mode | Max. 200mm/s | X1 Axis (Drive unit) Drive speed - Joystick mode | 0 to 50m |
X1 Axis (Drive unit) Measuring speed | 0.02 mm/s/ 0.05/mm/s / 0.1mm/s /0.2 mm/s / 0.5mm/s / 1.0mm/s / 2.0mm/s | X1 Axis (Drive unit) Measuring direction - Contour | Forward / backward | X1 Axis (Drive unit) Straightness - Contour | 2µm/200mm |
X1 Axis (Drive unit) Accuracy (20°C) - Contour | ±(0.8+4L/200)μm L: Measuring length (mm) | X1 Axis (Drive unit) Measuring direction - Surface roughness | Backward | X1 Axis (Drive unit) Straightness - Surface roughness | 0.5 µm/200mm |
Z1 Axis (Detector) Measuring range - Contour | 60mm (±30mm from the horizontal) | Z1 Axis (Detector) Resolution - Contour | 0.02 µm | Z1 Axis (Detector) Measuring direction - Contour | Both forward and backward (Direction is changed by FORMTRACEPAK) |
Z1 Axis (Detector) Vertical movement of the stylus - Contour | Arc motion | Z1 Axis (Detector) Scale type - Contour | Arc | Z1 Axis (Detector) Accuracy (20°C) - Contour | ±(0.8+|2H|/100)μm / H: Measuring height from horizontal position (mm) |
Z1 Axis (Detector) Measuring force - Contour | 10, 20, 30, 40, 50mN (setting measuring force Formtracepak) | Z1 Axis (Detector) Traceable angle - Contour | Ascent: 70°, Descent: 70°, (Depends on the surface texture.) | Z1 Axis (Detector) Stylus tip - Contour | 30° cone, Carbide |
Z1 Axis (Detector) Measuring range - Surface roughness | 800μm/80μm/8μm | Z1 Axis (Detector) Resolution - Surface roughness | 0.01µm/0.001µm/0.0001µm | Z1 Axis (Detector) Measuring force - Surface roughness | 0.75mN |
Z2 Axis (Column) Drive range | Specification is selectable from 300mm or 500mm | Z2 Axis (Column) Drive speed - CNC mode | Max. 200mm/s | Z2 Axis (Column) Drive speed - Joystick mode | 0 to 50mm/s |
Z2 Axis (Column) Accuracy (at 20°C) - Model without α Axis | ±(1.5+10H/1000)μm H: Z2 axis measuring height (mm) | Z2 Axis (Column) Accuracy (at 20°C) - Model with α Axis | - | Z2 Axis (Column) Base size (W×D) | 750×600mm |
How can we improve?
How can we improve?