Linear Height SERIES 518 — High Performance 2D Measurement System
Caution
Product Description
• Excellent accuracy of (1.1+0.6L/600)μm with 0.1μm/0.4μm resolution/repeatability.
• High-accuracy Height Gage incorporating a wide range of measurement functions.
• To achieve best-in-class accuracy, a highaccuracy reflective-type linear encoder and high-accuracy guide are used.
• Measurement can be implemented by iconbased commands that also support easy onekey operation.
Perpendicularity (frontal) of 5μm and straightness of 4μm are guaranteed.
• The TFT LCD provides excellent visibility and operability.
• Pneumatic full/semi-floating system allows adjustment of air-cushion height.
• Basic statistical functions are provided and, additionally, RS-232C data output provides the option of evaluating measurement data externally with SPC software on a PC.
• Backup/Restore of data and measurement part programs can be implemented using USB storage devices (FAT16/32 format compatible).