Thermopit for Vacuum 3MC

[Features]
·It can be attached to a wafer to manage the temperature history ranging from 40°C to 280°C.　
·Since the surface irregularities are reduced as much as possible, it is less susceptible to effects of plasma.　
·The surface is covered with a polyimide film, and scattering of ink is prevented by back printing.　
·Since it uses changes in the physical characteristics of petroleum-based natural wax that is certified as a food additive, it does not contain substances of concern such as lead, mercury and chromium, and is highly safe.