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Mass Flow Controller 20SLM Air

Mass Flow Controller 20SLM Air

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  • Until 31/07/2024
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Specifications of 3-6947-01

Part Number
3-6947-01 SALE
Part Number Price Name Minimum Order Qty. Volume Discount Days to Ship

฿ 58,513.00

฿ 46,810.40

LIQUID FEEDER EQUIPMENT 1 Piece(s) 19 Day(s)

Product Description

【Product Specifications】
・Model number: C1020-4S2-20L-Air
・Flow rate (SLM): 20
・Gas: Air
・Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 - 35℃)
・Reproducibility: +/- 0.2% FS
・Flow rate control range: 5 - 100% FS
・Fluid: Gas
・Available temperature: 5 - 50℃ 85%RH or less
・Responsiveness: 6sec
・Operation pressure range: 50 - 300kPa
・Pressure resistance: 1MPa (G)
・External leak rate: 1 x 10 - 7Pa, m3/sec (He) or less
・Gas contact unit material: Stainless Steel (SUS316), PTFE, fluorine Rubber
・Surface treatment: Mechanical processing finish
・Fittings: Equivalent to 1/4in.SWL
・Input and output: Analog signal (0 - 5VDC)
・Valve type: N/O normal open
・Drive power: +15VDC +/- 5% 60mA, -15VDC +/- 5% 150mA
・Communication system: Analog 0 - 5VDC (D-Sub9Pin connector)
・Size: 160 x 33.6 x 105mm

Specifications of 3-6947-01

Part Number
3-6947-01 SALE
Part Number Price Name Minimum Order Qty. Volume Discount Days to Ship

฿ 58,513.00

฿ 46,810.40

LIQUID FEEDER EQUIPMENT 1 Piece(s) 19 Day(s)

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