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Highly reliable fluoropolymer membrane clean gas filter.
[Features]
·Element cannot be replaced
·Precision filtration of compressed air and nitrogen for semiconductor processes
·Filtration degree 0.01 µm (filtration efficiency 99.99%)
·Disposable type, multiple disc type
·Connection method: Rc, TSJ, URJ
·Nominal pipe thread size: 1/4, 3/8
Disposable Type / Multiple Disc Type, SFC100 Series external appearance
SFC10□ flow rate characteristics graph
Fluid: Compressed air / Inlet temperature: 20°C
Applicable Fluid | Air, nitrogen | |
---|---|---|
Operating Pressure*1 | MAX. 0.99 MPa, Vacuum 1.3 × 10-6 kPa | |
Operating Temperature | 5 to 120℃ | |
Element Proof Differential Pressure | MAX. 0.42 MPa | |
Element Reverse Differential Pressure | MAX. 0.07 MPa | |
Filtration*2 | 0.01 μm (filtration efficiency 99.99%) | |
Helium Leak Volume | 4.0 × 10-9 Pa・m3/sec or less | |
Main Material | Case | SUS316 (Interior/Exterior: Electrolytic polishing) |
Filtration Medium | PTFE membrane | |
Seal | PTFE |
*1: The maximum operating pressure is 0.99 MPa since this product does not conform to the High Pressure Gas Safety Law (Japan). Ensure that, if 0.1 MPa is exceeded, there is no pressure fluctuation during use.
*2: Measured under manufacturer's specified conditions.
Model | Rated Flow L/min (ANR)* | Connection | Filtration Area cm2 | Weight (kg) |
---|---|---|---|---|
SFC100-02 | 240 | Rc 1/4 (female thread) | 300 | 0.35 |
SFC100-03 | Rc 3/8 (female thread) | 0.36 | ||
SFC102-02 | TSJ 1/4 | 0.40 | ||
SFC102-03 | TSJ3/8 | 0.41 | ||
SFC105-02 | URJ 1/4 | 0.44 | ||
SFC105-03 | URJ3/8 | 0.49 |
*At inlet pressure of 0.7 MPa and pressure drop of 0.02 MPa.
Disposable Type / Multiple Disc Type, SFC100 Series diagram
Number | Part name | Material | Note |
---|---|---|---|
1 | Case 1 | SUS 316 | Electrolytic polishing (interior/exterior) |
2 | Case 2 | ||
3 | Element | PTFE, PVDF | - |
4 | O-ring | PTFE | - |
5 | Spacer | PVDF | - |
(Unit: mm)
SFC100-02/SFC100-03 dimensional drawing
(Unit: mm)
SFC102-02/SFC102-03 dimensional drawing
(Unit: mm)
SFC105-02/SFC105-03 dimensional drawing
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Type | Standard | Compressed Air Quality | General Dry Air | Filtration Level | 0.01μm |
---|---|---|---|---|---|
Treatment Air Flow Rate(l/min) | 240 | Operating Environment | Clean Room Specifications (Prevent dust) | Drain Cock | No |
Bowl Material | SUS316 | Bowl Guard | No | Operating Pressure Range(MPa) | null::0.99 |
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