Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)

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- ■ SMC Product Line
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■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Product Description
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃
Normally Closed Type High Vacuum Solenoid Valve XSA Series Specifications

Face seal fitting appearance
A fitting with a high sealing performance in everything from vacuum pressure to positive pressure that forms a seal by placing a metal gasket at the end of the sleeve and the tightening of the nut.

Compression fitting external appearance
A self-aligning tube fitting that uses ferrule rings which align and connect with the tubing when the nut is tightened.

Female thread (Rc, NPT) external appearance
| Model | XSA1-11 XSA1-12 | XSA1-21 XSA1-22 | XSA2-22 | XSA2-32 | XSA2-43 Note 3: | XSA3-32 XSA3-33 | XSA3-43 | |
|---|---|---|---|---|---|---|---|---|
| Action | Normally closed | |||||||
| Fluids | Air, inert gas | |||||||
| Orifice Diameter (mm) ø | 2 | 3 | 4.5 | 6 | 4.5 | 6 | ||
| Withstand Pressure MPa (G) | 1.5 | |||||||
| Minimum Operating Pressure Pa (abs) / OUT Side | 1 × 10-6 | |||||||
| Maximum Operating Pressure MPa (G) / IN Side | 1.0 | |||||||
| Maximum Operating Pressure Differential MPa Note 1: | 0.8 | 0.3 | 1.0 | 0.3 | 0.1 | 0.8 | 0.3 | |
| Reverse Pressure Potential MPa (G) Note 2: | 0.5 | 0.25 | 0.4 | 0.2 | 0.05 | 0.2 | 0.15 | |
| Amount of leakage Pa·m3/s Note 4: | Internal | 1.3 × 10-9 | ||||||
| External | 1.3 × 10-11 | |||||||
| Piping Connection Method | Face seal fitting / compression fitting / (Rc, NPT) female thread | |||||||
| Connection Size | Face Seal Fitting (Inches) Compression Fitting (Inches) | 1/4 | 3/8 | 1/4 | 3/8 | |||
| (Rc, NPT) female thread | 1/8 | 1/4 | - | 3/8 | ||||
| Ambient Temperature and Operating Fluid Temperature (°C) | 5 to 60 | |||||||
| Rated Voltage Note 5: | 100/110/200/220/230/240/24/48 V AC, 12/24 V DC | |||||||
| Power Consumption (W) Note 6: | DC | 4.5 | 7 | 10.5 | ||||
| Apparent Power (VA) Note 6: | AC | 7 | 9.5 | 12 | ||||
| Coil Temperature Rise (°C) Note 7: | DC | 50 | 55 | 65 | ||||
| AC | 60 | 70 | 70 | |||||
| Allowable Voltage Fluctuation | ±10% or less of rated voltage | |||||||
| Allowable Leakage Voltage | DC | 2% or less of rated voltage | ||||||
| AC | 5% or less of rated voltage | |||||||
| Coil Insulation Type | Class B | |||||||
| Weight kg Note 8: | Face Seal Fitting | 0.28 | 0.41 | 0.42 | 0.53 | 0.62 | ||
| Compression Fitting | 0.28 | 0.41 | 0.42 | 0.53 | 0.55 | |||
| (Rc, NPT) female thread | 0.33 | 0.53 | - | 0.74 | 0.74 | |||
Note 1: The operating pressure differential is the difference between port 1 (high pressure side) and port 2 (low pressure side).
Example: At 0.3 MPa, port 2 is vacuumed (1 Torr or less), while port 1 can be pressurized up to 0.2 MPa (G).
Note 2: The reverse potential pressure indicates the pressure which can be applied from port 2 when port 1 is at atmospheric pressure.
Note 3: Face seal fitting / compression fitting only.
Note 4: Amount of leakage when the ambient temperature is at 20°C and there is 0.1 MPa of differential pressure (gas permeation not included).
Note 5: AC types are all equipped with a full-wave rectifier.
Note 6: Power consumption and apparent power are values at an ambient temperature of 20°C and with rated voltage applied. (Variation range: ±10%)
Note 7: Value at an ambient temperature of 20°C and with rated voltage applied. However, this value depends on the ambient environment.
Note 8: This value is for the grommet type.
Face Seal Fitting / Compression Fitting Flow Rate Characteristics
| - | XSA1-12 | XSA1-22 | XSA2-22 | XSA2-32 | XSA2-43 | XSA3-32 | XSA3-43 | |
|---|---|---|---|---|---|---|---|---|
| Flow Rate Characteristics | C [dm3/(s·bar)] | 0.55 | 1.07 | 1.07 | 1.51 | 2.78 | 1.54 | 2.89 |
| b | 0.41 | 0.36 | 0.34 | 0.24 | 0.21 | 0.24 | 0.21 | |
Female Thread (Rc, NPT) Flow Rate Characteristics
| - | XSA1-11 | XSA1-21 | XSA2-22 | XSA2-32 | XSA3-33 | XSA3-43 | |
|---|---|---|---|---|---|---|---|
| Flow Rate Characteristics | C [dm3/(s·bar)] | 0.54 | 1.14 | 1.14 | 2.23 | 2.37 | 3.50 |
| b | 0.36 | 0.39 | 0.42 | 0.38 | 0.40 | 0.15 | |
Face Seal Fitting and Compression Fitting Drawing
(Unit: mm)

Grommet: G dimensional drawing (lower left: no spacer / lower right: with spacer)

Grommet: GS dimensional drawing

Conduit: C dimensional drawing

Flat terminal: F dimensional drawing (left: terminal)

DIN terminal: D dimensional drawing

Terminal: T dimensional drawing
| Model | A | B | Bs | C | D | E | F | L | M | P [inch] |
|---|---|---|---|---|---|---|---|---|---|---|
| XSA1-□2S | 22 | 55 | 24 | 63 | 30 | 8.5 | 20 | 3 | 8 | 1/4 |
| XSA1-□2V | 50 | - | ||||||||
| XSA2-□2S | 25 | 63 | 31.5 | 73.5 | 35 | 11.5 | 22 | 5 | 10 | |
| XSA2-□2V | 56 | - | ||||||||
| XSA2-43S | 64.5 | 31 | 3/8 | |||||||
| XSA2-43V | 67 | - | 78 | |||||||
| XSA3-32S | 63 | 31.5 | 40 | 24.5 | 1/4 | |||||
| XSA3-32V | 56 | - | ||||||||
| XSA3-43S | 64.5 | 31 | 3/8 | |||||||
| XSA3-43V | 67 | - | 82.5 |
| Model | Grommet: G | Grommet: GS | Conduit: C | Flat Terminal: F | DIN Terminal: D | Terminal: T | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| G | H | G | H | G | H | G | H | G | H | J | G | H | J | |
| XSA1-□2S | 27 | 53.5 | 30 | 40 | 47.5 | 47.5 | 23 | 53.5 | 64.5 | 45.5 | 52.5 | 99.5 | 47.5 | 68.5 |
| XSA1-□2V | ||||||||||||||
| XSA2-□2S | 29.5 | 63 | 32.5 | 49.5 | 50 | 57 | 25.5 | 63 | 67 | 55 | 55 | 102 | 57 | 71 |
| XSA2-□2V | ||||||||||||||
| XSA2-43S | ||||||||||||||
| XSA2-43V | 67.5 | 54 | 61.5 | 67.5 | 59.5 | 61.5 | ||||||||
| XSA3-32S | 32 | 35 | 52.5 | 28 | 69.5 | 57.5 | 104.5 | 73.5 | ||||||
| XSA3-32V | ||||||||||||||
| XSA3-43S | ||||||||||||||
| XSA3-43V | 72 | 58.5 | 66 | 72 | 64 | 66 | ||||||||
Product Structure/Operation

Structure and operation of normally closed type high vacuum solenoid valve, XSA Series
| Number | Name | Material |
|---|---|---|
| 1 | Solenoid Coil | Cu + Fe + resin |
| 2 | Fixed Iron Core | Fe |
| 3 | Tube | SUS* |
| 4 | Residual (Seat) | PET* |
| 5 | Movable Armature Iron Core Assembly’ | FKM, SUS, resin (PPS)* |
| 6 | Spring | SUS* |
| 7 | Body | SUS* |
| 8 | O-ring | FKM* |
| 9 | Spacer | Al |
- *Parts in contact with gas
Options Descriptions
(9) Spacer (face seal fitting / compression fitting only): The spacer is used to raise the body when fastening it onto a flat area.
Working Principle
By energizing the solenoid coil (1), the armature movable iron core assembly’ (5) overcomes the composite force, which consists of the force acting on the poppet due to differential pressure and the reactive force of the spring (6), and is suctioned to the fixed iron core (2), thus opening the poppet.
When the energization of the solenoid coil (1) is stopped, the armature movable iron core assembly’ (5) separates from the fixed iron core (2) under the reactive force of the spring (6), thus closing the poppet.
Notes
- *Cannot be used for emergency shut-off valves, etc. The valve described in the catalog is not designed to be used as a safety valve such as an emergency shut-off valve. For such systems, take other measures that will reliably secure safety.
- *Long-term continuous energization will cause the solenoid coil to generate heat. Avoid use in airtight containers. Install in locations with good ventilation. Do not touch the solenoid valve during or immediately after energization.
- *Refer to the manufacturer's catalog for product information not detailed above.