Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

Brand :

SMC

Caution

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Manual/Bellows Seal, XMH/XYH Series Specifications

Angle valve XMH Series external appearance

In-line type XYH series external appearance

Model		XMH-16	XMH-25 XYH-25	XMH-40 XYH-40	XMH-50 XYH-50
Flange (Valve) Size		16, CF034	25	40, CF070	50
Valve Type		Manual
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 150
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1:}		5	14	45	80
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Flange Type		KF (NW), CF	KF (NW)	KF (NW), CF	KF (NW)
Main Material		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Actuation torque N·m		0.1 ≤	0.15≦	0.35≦	0.5≦
Handle revolutions		5	7	10	13
Weight kg ^{Note 2:}	XMH	0.31 (0.35)	0.57	1.35 (1.71)	2.02
Weight kg ^{Note 2:}	XYH	-	0.62	1.37	2.42

Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Product Drawing

(Unit: mm)

XMH angle-type dimensional drawing

XYH in-line type dimensional drawing

Model	A	B	C	D	Fn	Fc	G	H	J	P.C.D. L1	L2
XMH-16	40	100.5	38	1	30	34	17	35	18	P.C.D 27	6 × ø4.4 mm
XMH-25	50	114	48	1	40	-	26	40.5	21.5	-	-
XMH-40	65	162.5	66	2	55	70	41	57	30	P.C.D 58.7	6 × ø6.6 mm
XMH-50	70	179.5	79	2	75	-	52	70	35	-	-

Model	A	B	C	D	E	Fn	G	H	J
XYH-25	100.2	75.8	48	1	23.5	40	26	40.5	21.5
XYH-40	130	102.5	66	2	38	55	41	57	30
XYH-50	178	119	79	2	53	75	52	70	35

Product Diagram

XMH angle-type (left) and XYH in-line type (right) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Notes

*The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
*Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
*Refer to the manufacturer's catalog for parts other than those detailed above.