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Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Angle valve XMC Series external appearance
Angle valve XMC series pilot port direction
In-line type XYC series external appearance
In-line type XYC series pilot port direction
Model | XMC-16 | XMC-25 XYC-25 | XMC-40 XYC-40 | XMC-50 XYC-50 | XMC-63 XYC-63 | XMC-80 XYC-80 | |
---|---|---|---|---|---|---|---|
Flange (Valve) Size | 16, CF034 | 25 | 40, CF070 | 50 | 63, CF114 | 80 | |
Valve Type | Double acting (dual operation), pressurize to open/close | ||||||
Fluids | Inert gas vacuum | ||||||
Operating Temperature (°C) | 5 to 60 (5 to 150 for high temperature type) | ||||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||||
Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | 200 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||||
Operating Time (s) | 0.08 | 0.15 | 0.35 | 0.4 | 0.54 | 0.7 | |
Flange Type | KF (NW), CF | KF (NW) | KF (NW), CF | KF (NW) | KF (NW), K (DN), CF | KF (NW), K (DN) | |
Main Material | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | ||||||
Pilot Pressure MPa (G) | 0.3 to 0.6 | 0.4 to 0.6 | |||||
Pilot Port Connection Port Diameter | M5 | Rc 1/8 | |||||
Weight kg Note 2: | XMC | 0.36 (0.40) | 0.62 | 1.40 (1.76) | 2.10 | 3.80 (5.16) | 6.30 |
XYC | - | 0.67 | 1.42 | 2.50 | 4.50 | 7.80 |
Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
(Unit: mm)
XMC-16 to 40 angle type dimensional drawing
Model | A | B | C | D | Fn | Fc | G | H | J | P.C.D L1 | L2 |
---|---|---|---|---|---|---|---|---|---|---|---|
XMC-16 | 40 | 110 | 38 | 1 | 30 | 34 | 17 | 40 | 26 | P.C.D 27 | 6 × ø4.4 mm |
XMC-25 | 50 | 120 | 48 | 1 | 40 | - | 26 | 39 | 28 | - | - |
XMC-40 | 65 | 171 | 66 | 2 | 55 | 70 | 41 | 63 | 36 | P.C.D 58.7 | 6 × ø6.6 mm |
XMC-50 to 80 angle type dimensional drawing
Model | A | B | C | D | Fn | Fd | Fc | G | H | J | P.C.D L1 | L2 | K |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
XMC-50 | 70 | 183 | 80 | 31 | 75 | - | - | 52 | 77 | 29 | - | - | 10.5 |
XMC-63 | 88 | 209 | 100 | 39 | 87 | 95 | 114 | 70 | 76.5 | 36 | P.C.D 92.1 | 8 × ø8.4 mm | 9 |
XMC-80 | 90 | 250 | 117 | 45.5 | 114 | 110 | - | 83 | 105 | 44 | - | - | 9 |
XYC-25, XYC-40 / in-line type dimensional drawing
Model | A | B | C | D | E | Fn | G | H | J |
---|---|---|---|---|---|---|---|---|---|
XYC-25 | 100.2 | 85 | 48 | 1 | 23.5 | 40 | 26 | 64 | 28 |
XYC-40 | 130 | 115 | 66 | 2 | 38 | 55 | 41 | 84 | 36 |
XYC-50 to 80- in-line type dimensional drawing
Model | A | B | C | D | E | Fn | Fd | G | H | J | K | M |
---|---|---|---|---|---|---|---|---|---|---|---|---|
XYC-50 | 178 | 121 | 80 | 31 | 53 | 75 | - | 52 | 104 | 29 | 10.5 | 78 |
XYC-63 | 209 | 148 | 100 | 39 | 61 | 87 | 95 | 70 | 126 | 36 | 9 | 99 |
XYC-80 | 268 | 177 | 117 | 45.5 | 80 | 114 | 110 | 83 | 150 | 44 | 9 | 116 |
XMC angle-type (left) and XYC in-line type (right) diagram
*Refer to p. 497 of the manufacturer's catalog for maintenance parts.
Part Number |
---|
XMC-25-M9BZA-XS1B |
Part Number | Price | Name | Minimum Order Qty. | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
฿ 24,608.20 | SMC PIPING MANIFOLD | 1 Piece(s) | 22 Day(s) | KF | 25 | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | 5 |
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Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
Seal Type | Bellows Seal |
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