Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
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*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Product Description
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Aluminum High Vacuum Angle Valve, Electromagnetic Type, Bellows Pressure Balance, XLS Series Specifications
XLS Series (no control power supply) external appearance
XLS Series (with control power supply) external appearance
| Model | XLS-16 | XLS-25 | XLS-16-P□G | XLS-25-P□G | |
|---|---|---|---|---|---|
| Valve Type | Normally closed (N.C.) | ||||
| Fluids | Inert gas vacuum | ||||
| Operating Temperature (°C) | 5 to 40 | ||||
| Operating Pressure Pa (abs) | 0.1 MPa (G) to 1 × 10-6 (abs) | ||||
| Conductance L/s Note 1: | 5 | 8 | 5 | 8 | |
| Amount of leakage Pa·m3/s | Internal | 1.3 × 10 -8, values at normal temperature and excluding gas permeation | |||
| External | 1.3 × 10 -11, values at normal temperature and excluding gas permeation | ||||
| Flange Type and Size | KF16 | KF25 | KF16 | KF25 | |
| Main Material Note 2: | Main body: aluminum alloy, Main parts: stainless steel, PFA, FKM (standard sealing material) | ||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||
| Control Power Supply Yes/No | None | Yes | |||
| Operating Power Supply Voltage | 24/6, 48/12, 100/24 V DC | 24 V DC, 100/200 V AC | |||
| Allowable Voltage Fluctuation % | ±10 | ||||
| Electrical Entry | G, C, D, T types | G type only | |||
| Lead Wire | AWG20, outer diameter: 2.63 mm | VCTF2 × 0.75, outer diameter: 2.3 mm, Sheath outer diameter: 6.6 mm | |||
| Coil Insulation Type | Class B | ||||
| Maximum Operating Frequency (Hz) | 0.17 | ||||
| Weight (kg) | 0.4 | 0.7 | 0.7 | 1.0 | |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: A coating of vacuum grease (Y-VAC3) has been applied to the valve seat section of the vacuum part.
Product Power/Current (When Applying Rated Voltage)
| Model | Startup | Holding | ||||
|---|---|---|---|---|---|---|
| Power (W) | Current (A) | Power (W) | Current (A) | |||
| XLS-16- | □G/C/D/T, P5G | 36 | 1.5 | 4.8 | 0.38 | |
| P1G | 50 Hz | 30.5 | 0.47 | 14.8 | 0.35 | |
| 60 Hz | 10 | 0.27 | ||||
| P2G | 50 Hz | 30 | 0.24 | 4.9 | 0.11 | |
| 60 Hz | 2.3 | 0.10 | ||||
| XLS-25- | □G/C/D/T, P5G | 47 | 2.0 | 5.3 | 0.5 | |
| P1G | 50 Hz | 42 | 0.62 | 20 | 0.46 | |
| 60 Hz | 13.5 | 0.36 | ||||
| P2G | 50 Hz | 45 | 0.35 | 6.7 | 0.15 | |
| 60 Hz | 3.0 | 0.12 | ||||
Product Drawing
XLS no control power supply
(Unit: mm)
Grommet (G) dimensional drawing
Conduit (C) dimensional drawing
Terminal (T) dimensional drawing
DIN terminal (D) dimensional drawing
XLS with control power supply
(Unit: mm)
Grommet (G) dimensional drawing
| Model | A | B | C | D | E | F | G | J | K | L | M |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XLS-16-□G | 40 | 104 | 113 | 38 | 30 | 35 | 17 | 23 | - | - | 25.5 |
| XLS-16-□C | 96 | 41 | - | - | |||||||
| XLS-16-□D | 60 | 48 | - | ||||||||
| XLS-16-□T | 129 | 95 | 62 | - | |||||||
| XLS-25-□G | 50 | 128.5 | 138.5 | 48 | 40 | 40 | 26 | 25.5 | - | - | 28 |
| XLS-25-□C | 121.5 | 43 | - | - | |||||||
| XLS-25-□D | 120.5 | 63 | 51 | - | |||||||
| XLS-25-□T | 121.5 | 154.5 | 97 | 66 | - | ||||||
| XLS-16-P□G | 40 | 96 | 113 | 38 | 30 | 35 | 17 | 23 | 87 | 66.5 | - |
| XLS-25-P□G | 50 | 121.5 | 138.5 | 48 | 40 | 40 | 26 | 25.5 | 89.5 | 69 | - |
Product Structure/Operation
XLS Series diagram
*Refer to p. 465 of the manufacturer's catalog for maintenance parts.
Working Principle
- XLS-□-□□ (no control power supply)
Applying the starting voltage across the coil assembly for approx. 0.15 to 0.2 s opens valve (9). Thereafter, this is held at 25% of the starting voltage. Do not apply the starting voltage for more than 0.3 s as doing so may cause coil burnout. When power to the coil assembly is stopped, valve (9) closes. - XLS-□-P□G (with control power supply)
Applying the rated voltage across the coil assembly opens valve (9). When power to the coil assembly is stopped, valve (9) closes.
*The pressure balance mechanism allows an unrestricted exhaust direction.
Notes
- *The body material is A6063, the bellows material is SUS316L, the metal materials used for the other vacuum parts are 13Cr stainless steel, SUS304 and A2017 and the sealing material is FKM. The armature assembly part of the vacuum sections uses a fluorinated resin (PFA). A fluorinated grease coating has been applied to the valve in the vacuum section. Check that the fluid in use will not damage the selected material.
- *When there is no operating power supply, the starting voltage is applied for only 0.15 to 0.2 s. After this, a holding voltage (25% of the starting voltage) should be applied. Failure to do this may cause coil burnout or fire.
- *Be sure to install a fuse or an earth leakage circuit breaker in the power supply circuit.
- *Use within the operating pressure range.
- *Refer to the manufacturer's catalog for parts other than those detailed above.