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A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
XLDV Series external appearance
XLDV Series operating port direction
Model | XLD (V)-25 | XLD(V)-40 | XLD(V)-50 | XLD(V)-63 | XLD(V)-80 | |
---|---|---|---|---|---|---|
Valve Type | Always closed (spring return and seal) (both main and initial exhaust valves) | |||||
Fluids | Inert gas vacuum | |||||
Operating Temperature (°C) | XLDV | 5 to 60 (5 to 150 for high temperature type) | ||||
5 to 50 | ||||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
Conductance L/s Note 1: | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
Flange Type | KF (NW) | KF (NW) / K (DN) | ||||
Main Material Note 3: | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | |||||
Surface Treatment | External: hard anodized aluminum, Internal: base material | |||||
Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
Pilot Port Connection Port Diameter | XLDV | M5: 1 (P), 3 (R) ports | ||||
Weight (kg) | XLDV | 0.57 | 1.3 | 1.9 | 3.5 | 5.7 |
Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
(Unit: mm)
XLDV-25 type with solenoid valve dimensional drawing
XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve dimensional drawing
Model | A | B | C | Fn | Fd | G | M | N | K |
---|---|---|---|---|---|---|---|---|---|
XLDV-40 | 65 | 170 | 66 | 55 | - | 41 | 48.5 | 53.5 | 15 |
XLDV-50 | 70 | 183 | 79 | 75 | - | 52 | 55 | 57.5 | 17.5 |
XLDV-63 | 88 | 217 | 100 | 87 | 95 | 70 | 66.5 | 72.2 | 20 |
XLDV-80 | 90 | 256 | 117 | 114 | 110 | 83 | 75 | 82.6 | 26.5 |
Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal diagram
XLDV-25 type with solenoid valve diagram
XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve diagram
*Refer to the manufacturer's catalog for maintenance parts.
Initial exhaust valve conductance settings graph
Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)
""A" Section Thread Tightening Torque
Part Number |
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XLDV-25K-M9BA-1HZ |
Part Number | Price | Name | Minimum Order Qty. | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
฿ 39,946.98 | SMC MECHANICAL AIR VALVE | 1 Piece(s) | 55 Day(s) | KF | 25 | AC100V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | None | 0.5 |
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Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
Driving Type | Directly Operated | Pipe Port Type | Flange | Seal Type | Bellows Seal |
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