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A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact
XLD Series external appearance
XLD Series operating port direction
Model | XLD-25 | XLD-40 | XLD-50 | XLD-63 | XLD-80 | |
---|---|---|---|---|---|---|
Valve Type | Always closed (spring return and seal) (both main and initial exhaust valves) | |||||
Fluids | Inert gas vacuum | |||||
Operating Temperature (°C) | XLD | 5 to 60 (5 to 150 for high temperature type) | ||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
Conductance L/s Note 1: | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
Flange Type | KF (NW) | KF (NW) / K (DN) | ||||
Main Material Note 3: | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | |||||
Surface Treatment | External: hard anodized aluminum, Internal: base material | |||||
Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
Pilot Port Connection Port Diameter | XLD | M5 | Rc 1/8 | |||
Weight (kg) | XLD | 0.5 | 1.2 | 1.8 | 3.4 | 5.6 |
Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
XLD air-operated type dimensional drawing
(Unit: mm)
Model | A | B | C | D | E | Fn | Fd | G | H | J | K |
---|---|---|---|---|---|---|---|---|---|---|---|
XLD-25 | 50 | 123 | 48 | 1 | 12 | 40 | - | 26 | 41 | 16 | 7.5 |
XLD-40 | 65 | 170 | 66 | 2 | 11 | 55 | - | 41 | 63 | 20 | 15 |
XLD-50 | 70 | 183 | 79 | 2 | 11 | 75 | - | 52 | 68 | 20 | 17.5 |
XLD-63 | 88 | 217 | 100 | 3 | 11 | 87 | 95 | 70 | 72 | 20 | 20 |
XLD-80 | 90 | 256 | 117 | 3 | 11 | 114 | 110 | 83 | 98 | 20 | 26.5 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.
XLD Series diagram
*Refer to the manufacturer's catalog for maintenance parts.
Initial exhaust valve conductance settings graph
Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)
""A" Section Thread Tightening Torque
Part Number |
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XLD-25-M9BMA |
Part Number | Price | Name | Minimum Order Qty. | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
฿ 34,796.77 | SMC PIPING MANIFOLD | 1 Piece(s) | 55 Day(s) | KF | 25 | 14L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 1 | None |
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Type | Air-Actuated Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
Seal Type | Bellows Seal |
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