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A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.
XLAV external appearance (side)
Model | XLA(V)-16 | XLA (V)-25 | XLA(V)-40 | XLA(V)-50 | XLA(V)-63 | |
---|---|---|---|---|---|---|
Valve Type | Normally closed (pressurize to open, spring seal) | |||||
Fluids | Inert gas vacuum | |||||
Operating Temperature °C | XLAV | 5 to 50 | ||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
Flange Type | KF (NW) | KF (NW) / K (DN) | ||||
Main Material | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | |||||
Surface Treatment | External: hard anodized aluminum, Internal: base material | |||||
Pilot Pressure MPa (G) | 0.4 to 0.7 | |||||
Pilot Port Connection Port Diameter | XLAV | M5: 1 (P) / 3 (R) ports | Rc1/8: 1 (P) port, M5: 3 (R) ports | |||
Weight (kg) | XLAV | 0.29 | 0.49 | 1.14 | 1.64 | 2.96 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
With solenoid valve
Valve side exhaust
*Refer to the manufacturer's catalog for maintenance parts.
By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.
XLAV dimensional drawing with solenoid valve
(Unit: mm)
Model | J | K | L | M | N |
---|---|---|---|---|---|
XLAV-16 | 35.5 | 12.3 | 10.2 | 3.6 | 3.6 |
XLAV-25 | 40.5 | 13.8 | 10.2 | 3.6 | 3.6 |
XLAV-40 | 50.5 | 21.6 | 10.2 | 3.6 | 3.6 |
XLAV-50 | 57 | 24.6 | 10.2 | 3.6 | 3.6 |
XLAV-63 | 78.5 | 28.7 | 12 | 4 | 2 |
XLAV dimensional drawing
A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type.
(Unit: mm)
Model | A | B | C | D | E Note 1: | Fn | Fd | G | H |
---|---|---|---|---|---|---|---|---|---|
XLAV-16 | 40 | 103 | 38 | 1 | - | 30 | - | 17 | 40 |
XLAV-25 | 50 | 113 | 48 | 1 | 12 | 40 | - | 26 | 39 |
XLAV-40 | 65 | 158 | 66 | 2 | 11 | 55 | - | 41 | 63 |
XLAV-50 | 70 | 170 | 79 | 2 | 11 | 75 | - | 52 | 68 |
XLAV-63 | 88 | 196 | 100 | 3 | 11 | 87 | 95 | 70 | 69 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Part Number |
---|
XLAV-16G-2M9NA-5L |
Part Number | Price | Name | Minimum Order Qty. | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Valve Type | Indicator | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Rated Voltage | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) | Heater Yes/No |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
฿ 1,810.40 | SMC VACUUM VALVE | 1 Piece(s) | 55 Day(s) | NW | 16 | - | With indicator | - | M9N | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | 24 V DC | L-type plug connector | None | External: hard anodized aluminum, Internal: base material | None | Not compatible | 0.5 | - |
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Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 3-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
Driving Type | Air Pilot | Pipe Port Type | Flange | Seal Type | Bellows Seal |
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