Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series
Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Product Description
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.
Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications
XMA Series external appearance
XYA Series external appearance
Specifications Table
| Model | XMA-16 | XMA-25 XYA-25 | XMA-40 XYA-40 | XMA-50 XYA-50 | XMA-63 XYA-63 | XMA-80 XYA-80 | |
|---|---|---|---|---|---|---|---|
| Flange (Valve) Size | 16, CF034 | 25 | 40, CF070 | 50 | 63, CF114 | 80 | |
| Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
| Fluids | Inert gas vacuum | ||||||
| Operating Temperature (°C) | 5 to 60 (5 to 150 for high temperature type) | ||||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||||
| Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | 200 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||||
| Operating Time (s) | 0.05 | 0.1 | 0.21 | 0.24 | 0.26 | 0.28 | |
| Flange Type | KF (NW), CF | KF (NW) | KF (NW), CF | KF (NW) | KF (NW), K (DN), CF | KF (NW), K (DN) | |
| Main Material | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | ||||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 | ||||||
| Pilot Port Connection Port Diameter | M5 | Rc 1/8 | |||||
| Weight kg Note 2: | XMA | 0.33 (0.37) | 0.61 | 1.40 (1.76) | 2 | 3.60 (4.96) | 6.2 |
| XYA | - | 0.66 | 1.42 | 2.40 | 4.30 | 7.70 | |
Note 1: Conductance is the value for the molecular flow of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Diagram
XMA (angle type), XYA (in-line type) diagram
*Refer to the manufacturer's catalog for maintenance parts.
Drawing
(Unit: mm)
XMA (angle type) dimensional drawing 1
XMA (angle type) dimensional drawing 2
| Model | A | B | C | D | Fn | Fd | Fc | G | H | P.C.D L1 | L2 |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XMA-16 | 40 | 103 | 38 | 1 | 30 | - | 34 | 17 | 40 | P.C.D 27 | 6 × ø4.4 mm |
| XMA-25 | 50 | 113 | 48 | 1 | 40 | - | - | 26 | 39 | - | - |
| XMA-40 | 65 | 158 | 66 | 2 | 55 | - | 70 | 41 | 63 | P.C.D 58.7 | 6 × ø6.6 mm |
| XMA-50 | 70 | 170 | 79 | 2 | 75 | - | - | 52 | 68 | - | - |
| XMA-63 | 88 | 196 | 100 | 3 | 87 | 95 | 114 | 70 | 69 | P.C.D 92.1 | 8 × ø8.4 mm |
| XMA-80 | 90 | 235 | 117 | 3 | 114 | 100 | - | 83 | 96 | - | - |
(Unit: mm)
XYA (in-line type) dimensional drawing 1
XYA (in-line type) dimensional drawing 2
| Model | A | B | C | D | E | Fn | Fd | G | H |
|---|---|---|---|---|---|---|---|---|---|
| XYA-25 | 100.2 | 79.5 | 48 | 1 | 23.5 | 40 | - | 26 | 64 |
| XYA-40 | 130 | 106 | 66 | 2 | 38 | 55 | - | 41 | 84 |
| XYA-50 | 178 | 119 | 79 | 2 | 53 | 75 | - | 52 | 95 |
| XYA-63 | 209 | 149 | 100 | 3 | 61 | 87 | 95 | 70 | 118 |
| XYA-80 | 268 | 178 | 117 | 3 | 80 | 114 | 110 | 83 | 142 |
Notes
- *Refer to the manufacturer's catalog for parts other than those detailed above.
- *The product images are representative images only.