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It has multi-position, and it can be used as APC.
Type | Motor Driven Vacuum Valve | Application | Single Item Operating | Mounting Orientation | Direct |
---|---|---|---|---|---|
Switching Type | AC Servo System | Pipe Port Type | Flange | Flange Nominal | 400 |
Amount of Leakage(Pa・m3/s) | 1.0 x 10-9 or less |
How can we improve?
How can we improve?