The Switch Can Also Sustain a High Degree of Vacuum Pressure
Brand :
METROL
Caution
Product Description
10^-5 Pa Contact switch for high vacuum class.
[Features]
· Positioning switch dedicated for high vacuum environment, manufactured only with low out gas compatible parts.
[Applications]
· For detecting the presence of a semiconductor wafer in a vacuum chamber.
· For positioning glass substrates in vacuum deposition systems and photovoltaic (PV) vacuum systems.
· For alignment of glass substrates in a vacuum deposition system for FPD, detection of mask tray seating, and retrieval of carrier origin.
· The product has been adopted by major semiconductor manufacturing equipment manufacturers, one after another.