G-TRAN Series, Atmospheric Pressure Pirani Vacuum Gauge SW1 & ISG1 Package

Caution
Product Description
This is an atmospheric pressure Pirani vacuum gauge, SW1 & ISG1 package that can measure a wide area from atmospheric pressure to 5 × 10^-2 Pa.
A highly corrosion-resistant platinum wire is used in filament materials so it can cope with various vacuum equipment.
[Features]
· Wide area measurement: measurement of atmospheric pressure to 5 × 10^-2 Pa in wide area is possible.
· Power supply voltage: operable at 24 V DC or 100 to 240 V AC.
· Improved visibility: equipped with an LED on the sensor unit to check for abnormalities.
· Single-action adjustment possible: atmospheric pressure adjustment and zero point adjustment are possible with single-action.
· Maintainability: probe can be easily replaced by the customer.
· Filament material platinum (Pt): platinum with high corrosion-resistance is used for the filament material.
· Measured value output signal: standard equipment of log output of 0 V DC to 10 V DC.
· Improved impact-resistance: design structure with high impact-resistance.
· Control output signal: 3 set points can be output.
· Serial communication specification: RS-485 communication is standard equipment.
· Display unit: display is easy to see LED.
· Applicable standards: CE standard compliant.
[Applications]
· Various products including solar cells, FPDs, semiconductors and electronic components.
· For process control in low vacuum area of manufacturing equipment.
· For process control in low vacuum region of furnaces and other industrial equipment.
· For process control in low vacuum region of various manufacturing equipment with many process chambers such as in-line type and single sheet type.