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Product DetailWafer Mapping Sensor M-DW1
SENSORS MD
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Product DetailProduct Description
Reflective wafer mapping sensor employing safe LED light.
[Features]
· A safety-first LED type: Conventional laser type mapping sensors used laser light that passed through the FOUP from the inside of the load boats. This posed a risk for the operator as they could be hit by said light.
· The M-DW1 successfully uses LEDs as a light source.
· This ensures operator safety.
· It is possible to detect the nitride film wafer: The nitride film has the property of absorbing light of a specific wavelength, and the wavelength to be absorbed varies depending on the film thickness of the nitride film.
· Therefore, in a sensor using a single wavelength laser light, all the light may be absorbed and become undetectable in some cases.
· On the other hand, the LED source has a wide wavelength range of light, so even a nitride film wafer can be reliably detected.
· Fast response in 0.5ms fast response in 0.5ms is realized.
· High speed responsiveness and high accuracy are both compatible with high dimensions.
· Detection of glass wafers is also possible. Since M-DW1 detects at the position of reflected light, it is capable regardless of whether the amount of reflected light is large or small.
· Detection of glass wafers is possible.
Basic Information
| Type | Special Purpose Sensor | Detected Objects | Opaque Objects / Wafer Mapping | Detection Type | Reflective |
|---|---|---|---|---|---|
| Detection Light Type | Standard | Head Shape | Square | Head Material | ABS |
| Amplifier Installation Type | Built-in Type | Standard Detected Subject(Ø) | 76.2 | Operating Temperature Range(°C) | 0::55 |
| Operating Humidity Range(%) | 35::85 | Protection Structure | IP20 | Max. Head Size, Width W(mm) | 18.3 |
| Max. Head Size, Height H(mm) | 80.6 | Max. Head Size, Length L(mm) | 50 | Detection type | Reflective |
| Connection method(m) | Cable type | Cable length | 300 | Number of core | 5 |
| Output | NPN output / PNP output, selectable with output selection switch | Timer function | Available | Detection distance details(mm) | 45 |
| Power supply voltage | 12-24 V DC ±10% | Output operation | Switchable either Light-ON or Dark-ON |
Please check the type/dimensions/specifications of the part M-DW1 in the Wafer Mapping Sensor M-DW1 series.
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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