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*The CAD data for this Series is being revised. This data will be made available as soon as the modifications have been completed.
[Features]
· Optimally suited for liquid crystal glass, painting/coating processes, and transporting semiconductor manufacturing equipment.
· The flexible resin material adheres work.
· Therefore, this mark-free type fitting is resistant to leaving adhesion marks.
· The detachability of work at the time of vacuum break is improved.
· The resin pad are replaceable without requiring spanners/hexagon wrenches for detaching the main body.
· Simple and compact structure.
· We offer this fitting is offered in a wide range of pad sizes, pad materials, and holder shapes.
· Pad holders have been added for applications that require the use of non-copper based metals and measures against low-concentration ozone.
· No copper-based metals are used in the metal component materials. HNBR is utilized for the rubber sealing material.
Model code | Tube I.D. øD | Pad O.D. ød | B | C | Connection config. code |
---|---|---|---|---|---|
VPMA10Q[5]-3B[9] | 2 | 10 | 34 | 6 | -M4 |
VPMA10Q[5]-4B[9] | 2.5 | 35 | 7 | ||
VPMA20Q[5]-4B[9] | 2.5 | 20 | 40.5 | 7 | -M6 |
VPMA20Q[5]-6B[9] | 4 | ||||
VPMA30Q[5]-4B[9] | 2.5 | 30 | |||
VPMA30Q[5]-6B[9] | 4 |
Units: mm
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Tightening torque of a pad holder fixing bulkhead nut is as below.
▪Pad dia.:ø10mm ▶ 2~3 N·m, ø20~ø30 mm ▶ 5~7 N·m
Part Number |
---|
VPMA10QK-3B |
VPMA10QKE-3B |
Part Number | Price | Name | Minimum Order Qty. | Volume Discount | Days to Ship | Environment | Resin Group Material | Color |
---|---|---|---|---|---|---|---|---|
฿ 1,871.38 | VACUUM PAD | 1 Piece(s) | 8 Day(s) | Standard | [PEEK] PEEK | - | ||
฿ 2,148.78 | VACUUM PAD | 1 Piece(s) | 8 Day(s) | Standard / Static electricity diffusion | [PEEK] Conductive PEEK | Black |
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Pad Type | Standard / Holder Set | Pad Shape | Prevention of Adsorption Trace | Mounting Method | Pad Screw Fixed |
---|---|---|---|---|---|
Material | Resin | Outer Diameter d(φ) | 10 | Height L1(mm) | 5.3 |
Mounting Fitting | Fixed Type | Stroke(mm) | 1 | Full length B(mm) | 34 |
Vacuum Outlet Direction | Top | Mount Connection Screw | M6 | Vacuum Outlet Tube Outer Diameter(φ) | 3 |
Fall Prevention Valve | None | Direct Attached Filter | None | Metal parts material | Standard Specifications |
Swiveling angle | 16° |
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