Vacuum Pad, Standard Type, VPE
Caution
Product Description
General-purpose pad; ideal for thick and flat workpieces.
[Features]
· Deep cup ideal for round fruits (such as apples) and round balls.
· Small types ideal for use in semiconductor production equipment.
· The small pad can be used with semiconductor components.
[Applications]
· The small type holders have been downsized from existing vacuum pad holders, allowing use in applications in which space is limited.
A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities
Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)
- *Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).
Fixed Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | ||||
|---|---|---|---|---|---|---|
| Type | Standard | Small | Standard | Small | Standard | Small |
| Symbol | VPA | VPMA | VPB | VPMB | VPE | VPME |
Spring Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | |||
|---|---|---|---|---|---|
| Type | Standard | Small | Standard | Small | Standard |
| Symbol | VPC | VPMC | VPD | VPMD | VPF |
Fitting Size
| Single-action Coupling (mm) | Ø1.8, Ø3, Ø4, Ø6 |
|---|---|
| Barbed Coupling (Applicable Tube Outer Diameter × Inner Diameter) (mm) | Ø1.8 × Ø1, Ø3 × Ø2, Ø4 × Ø2.5, Ø6 × Ø4 |
Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp s(G) 1/4
Features
Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.
Small pads can be used with semiconductor parts.
Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.
The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.
- *Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.