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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

**ขอราคาวันนี้ รับเลยของรางวัล ไม่ต้องลุ้น ถึง 31 ต.ค.นี้ ดูรายละเอียด ที่นี่

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • **ขอราคาวันนี้ รับเลยของรางวัล ไม่ต้องลุ้น ถึง 31 ต.ค.นี้ ดูรายละเอียด ที่นี่

  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number
XLH-16
XLH-16-XA
XLH-16-XAN1A
XLH-16-XAP1A
XLH-16-XN1A
XLH-16-XP1A
XLH-16-XP1B
XLH-16-XP1C
XLH-16-XQ1A
XLH-16-XR3A
XLH-25
XLH-25-XA
XLH-25-XAN1A
XLH-25-XAP1A
XLH-25-XAQ1A
XLH-25-XAQ1B
XLH-25-XAQ1C
XLH-25-XAU1A
XLH-25-XN1A
XLH-25-XP1A
XLH-25-XP1B
XLH-25-XP1C
XLH-25-XQ1A
XLH-25-XR1A
XLH-25-XR3A
XLH-25-XS1A
XLH-25H5
XLH-25H5-XU1A
XLH-40
XLH-40-XA
XLH-40-XAN1A
XLH-40-XN1A
XLH-40-XP1A
XLH-40-XQ1A
XLH-40-XQ1B
XLH-40H4
XLH-40H5
XLH-40H5-XQ1A
XLH-50
XLH-50-XA
XLH-50-XN1A
XLH-50H4
XLH-50H5
Part NumberVolume DiscountDays to Shipวันจัดส่งFlange Nominal Sonic Speed Conductance Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Heater Yes/No
46 Day(s) 165L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneNone
46 Day(s) 165L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNoneNone
Quote 165L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone
Quote 165L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone
46 Day(s) 165L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 165L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 165L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialValve sealNone
Quote 165L/SBarrel Perfluoro 70WInternal: 1.3 × 10-10, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialExternal sealNone
Quote 165L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
46 Day(s) 165L/SChemraz SSE38Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
46 Day(s) 2514L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneNone
46 Day(s) 2514L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNoneNone
46 Day(s) 2514L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone
46 Day(s) 2514L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone
46 Day(s) 2514L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone
46 Day(s) 2514L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationValve sealNone
46 Day(s) 2514L/SKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationExternal sealNone
Quote 2514L/SULTIC ARMOR UA4640Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone
46 Day(s) 2514L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 2514L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
46 Day(s) 2514L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialValve sealNone
Quote 2514L/SBarrel Perfluoro 70WInternal: 1.3 × 10-10, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialExternal sealNone
Quote 2514L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 2514L/SChemraz SS592Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 2514L/SChemraz SSE38Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 2514L/SVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
46 Day(s) 2514L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneWith heater for 120℃
Quote 2514L/SULTIC ARMOR UA4640Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealWith heater for 120℃
46 Day(s) 4045L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneNone
46 Day(s) 4045L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNoneNone
Quote 4045L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone
Quote 4045L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
46 Day(s) 4045L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
46 Day(s) 4045L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 4045L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialValve sealNone
46 Day(s) 4045L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneWith heater for 100°C
Quote 4045L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneWith heater for 120℃
Quote 4045L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealWith heater for 120℃
46 Day(s) 5080L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneNone
46 Day(s) 5080L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNoneNone
46 Day(s) 5080L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealNone
Quote 5080L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneWith heater for 100°C
46 Day(s) 5080L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneWith heater for 120℃

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Basic Informationข้อมูลพื้นฐาน

Type Manual Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Flange Type KF Seal Type Bellows Seal

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