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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

**ขอราคาวันนี้ รับเลยของรางวัล ไม่ต้องลุ้น ถึง 31 ต.ค.นี้ ดูรายละเอียด ที่นี่

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • **ขอราคาวันนี้ รับเลยของรางวัล ไม่ต้องลุ้น ถึง 31 ต.ค.นี้ ดูรายละเอียด ที่นี่

  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number
XLD-25
XLD-25-A93A
XLD-25-A93C
XLD-25-A93LA
XLD-25-A93LC
XLD-25-M9//
XLD-25-M9BA
XLD-25-M9BC
XLD-25-M9BLA
XLD-25-M9BLC
XLD-25-M9BMA
XLD-25-M9BZA
XLD-25-M9NA
XLD-25-M9NB
XLD-25-M9NC
XLD-25-M9NLA
XLD-25-M9NLB
XLD-25-M9NLC
XLD-25-M9PA
XLD-25-M9PC
XLD-25-M9PLA
XLD-25H0
XLD-25H5
XLD-25K
XLD-25K-M9//
XLD-25K-M9BA
XLD-25K-M9NA
XLD-25K-M9NLA
XLD-25KH0
XLD-25L
XLD-25L-A93A
XLD-25L-A93LA
XLD-25L-M9//
XLD-25L-M9BA
XLD-25L-M9BC
XLD-25L-M9BLA
XLD-25L-M9NA
XLD-25L-M9NC
XLD-25L-M9NLA
XLD-25L-M9NZA
XLD-25L-M9NZC
XLD-25L-M9PA
XLD-25L-M9PLA
XLD-25LH0
XLD-25LH5
XLD-25M
XLD-25M-A93A
XLD-25M-M9//
XLD-25M-M9BA
XLD-25M-M9BLA
XLD-25M-M9NA
XLD-25M-M9NLA
XLD-40
XLD-40-A90A
XLD-40-A90B
XLD-40-A93A
XLD-40-A93LA
XLD-40-M9//
XLD-40-M9BA
XLD-40-M9BB
Part NumberVolume DiscountDays to Shipวันจัดส่งFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No
46 Day(s) KF2514L/SFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
46 Day(s) KF2514L/SFlange side5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None1None
Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None5None
Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
46 Day(s) KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-M9P solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
46 Day(s) KF2514L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
46 Day(s) KF2514L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-With heater for 120℃
46 Day(s) KF2514L/SFlange surface, left5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
46 Day(s) KF2514L/SFlange surface, left5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF2514L/SFlange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, left5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, left5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
46 Day(s) KF2514L/SFlange surface, left5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
46 Day(s) KF2514L/SFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF2514L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
46 Day(s) KF2514L/SFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF2514L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, back5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None5None
46 Day(s) KF2514L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None5None
Quote KF2514L/SFlange surface, back5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, back5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
46 Day(s) KF2514L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF2514L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-With heater for 120℃
46 Day(s) KF2514L/SFlange surface, right5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF2514L/SFlange surface, right5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, right5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
46 Day(s) KF2514L/SFlange surface, right5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, right5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF2514L/SFlange surface, right5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF2514L/SFlange surface, right5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
46 Day(s) KF4045L/SFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF4045L/SFlange side5 to 60D-A90 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF4045L/SFlange side5 to 60D-A90 reed auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF4045L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF4045L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3None
Quote KF4045L/SFlange side5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-None
Quote KF4045L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None
Quote KF4045L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5None

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Basic Informationข้อมูลพื้นฐาน

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal Body Surface Treatment External: hard anodized aluminum, Internal: base material

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